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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
195982
Accent Optical  

Accent Optical  

Caliper Elan 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement:
Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement




!!!MULTIPLE UNITS AVAILABLE.  PLEASE INQUIRE!!!
1   Dresden, Saxony
202993
Accent Optical  

Accent Optical  

Caliper Elan 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement:
Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement

 

1   Dresden, Saxony
202999
Accent Optical  

Accent Optical  

Caliper Elan 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement:

Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement

 

In fab.  Idle

1   Dresden, Saxony
203004
Accent Optical  

Accent Optical  

Caliper Elan 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement:

Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement

 

In Fab.  Idle

1   Dresden, Saxony
203014
Accent Optical  

Accent Optical  

Caliper Elan 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement:

Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement

1   Dresden, Saxony
203070
Accent Optical  

Accent Optical  

Caliper Elan 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement:

Accent Optical, CALIPER ELAN, 300mm, Overlay Measurement

 

1   Dresden, Saxony
183108
Accent Optical  

Accent Optical  

Caliper Q300 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent Optical, Caliper Q300, Biorad, 300mm, Overlay Measurement:

Accent Optical, Caliper Q300, Biorad, 300mm, Overlay Measurement

Note: missing stage controller card.

Robotic pick and place wafer transport with two FOUPs

Optics module with variable magnification

High Resolution X,Y,Z & Theta Stage sortware controlled incorporating DSF Autofocus

Programmable Bandwidth Illumination system

Automated Pattern Recognition

Vibration Isolation Table

Fully I300I && GEM/MSEM compliant

GUI and Analysis package running under Lenux

File sharing by LAN

Facilities required:

NPS-208/3ph/60hz @ 20 amps, Facilities connect 3-phase, 5 wire star (3 phases, neu, gnd) rigid isolation base required with 200 mm pass through hole; requires twist-lock outlet and cord cap
Bulk Gases -
Compressed Air - 0.1 scfm @ 84 psi, thru 1/4" push fit, rear connection.  Provide regulator, isolation valve, and guage.
Process Vacuum - 2.1 scfm @ 800 mbar, thru 5/16" push fit, rear connection.  Provide isolation valve and guage

 

remarketing@surplusglobal.com

1   East Fishkill, New York
215017
Accent Optical  

Accent Optical  

Caliper Q300 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent Optical, Caliper Q300, Biorad, 300mm, Overlay Measurement:

Accent Optical, Caliper Q300, Biorad, 300mm, Overlay Measurement

Installed

Vintage : 2002

S/N : QS2179

1   East Fishkill, New York
216281
Accent Optical  

Accent Optical  

Caliper Q300 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent Optical, Caliper Q300, Nanometrics, 300mm, Overlay Measurement:

Accent Optical, Caliper Q300, Nanometrics, 300mm, Overlay Measurement

 

S/N : QS-2180

remarketing@surplusglobal.com

1   East Fishkill, New York
216282
Accent Optical  

Accent Optical  

Caliper Q300 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent Optical, Caliper Q300, Nanometrics, 300mm, Overlay Measurement:

Accent Optical, Caliper Q300, Nanometrics, 300mm, Overlay Measurement

S/N : QS2249

remarketing@surplusglobal.com

1   East Fishkill, New York
216283
Accent Optical  

Accent Optical  

Caliper Q300 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent Optical, Caliper Q300, Nanometrics, 300mm, Overlay Measurement:

Accent Optical, Caliper Q300, Nanometrics, 300mm, Overlay Measurement

S/N : QS 2264

Installed. Running

remarketing@surplusglobal.com

1   East Fishkill, New York
220127
Accent Optical  

Accent Optical  

Caliper 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Accent, Caliper, 300mm, S/N OS2176:

Accent, Caliper, 300mm, S/N OS2176

1   East Fishkill, New York
203973
Adixen  

Adixen  

APR4300 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Adixen, APR4300, 300mm Wafer Decontamination Tool:

Adixen, APR4300, 300mm Wafer Decontamination Tool

Unhooked.  In warehouse.

 

 

remarketing@surplusglobal.com

 

1   F* Malta, New York
215692
Akrion  

Akrion  

MP-2000 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Akrion, 200mm, Test Wafer Clean Bench, UP-V2 MP-2000:

Akrion, 200mm, Test Wafer Clean Bench, UP-V2 MP-2000

Missing Parts 

1   Singapore
219220
Applied Materials  

Applied Materials  

P5000 

List all items of this typeCluster PECVD Tools

in Production Tools

Amat P5000 CVD Tool:

P500051

Tool with 2 Etch Chambers and 2 Teos Chambers

1   Villach, Carinthia
218746
Applied Materials  

Applied Materials  

P5000 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Amat P5000 CVD Tool:

P500048

8 inch tool with 4 CVD chambers.

1   F* Villach, Carinthia
219252
AMAT, Centura XE+, 200mm, S/N R573 
AMAT, Centura XE+, 200mm, S/N R573 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

AMAT, Centura XE+, 200mm, S/N R573:

AMAT, Centura XE+, 200mm, Implant Anneal, S/N R573

 

Platform is MOD 1 build.

 

1   Singapore
219676
Applied Materials  

Applied Materials  

Centura 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT, Centura, 300mm, S/N 423383-XA-APRJ:

AMAT, Centura, 300mm, S/N 423383-XA-APRJ

 

remarketing@surplusglobal.com

 

1   Malta, New York
206311
Applied Materials  

Applied Materials  

Endura2 CVD Co Chamber, VOLTA  

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

AMAT, Endura2, CVD Co Chambers, VOLTA, 300mm:

AMAT, Endura2, CVD Co Chambers, VOLTA,

CVD Co CHAMBERS ONLY - Quantity 2

New In Original Factory Sealed  Boxes.

In Warehouse.

remarketing@surplusglobal.com

 

1   F* Malta, New York
202929
Applied Materials  

Applied Materials  

Centura Enabler 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Applied Materials, AMAT, Enabler, Centura, 300mm Etch:

Applied Materials, AMAT, Enabler, Centura, 300mm Etch

In Fab Idle.

 

1   Dresden, Saxony
182387
Applied Materials  

Applied Materials  

Enabler, Centura, 4 Chamber Etch 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Applied Materials, AMAT, Enabler, Centura, 300mm Etch, :

Applied Materials, AMAT, Enabler, Centura, 300mm Etch,

Dry Etch, Bx-, Cx-, E1 layers, 300mm wafers, 32nm BD/SICOH Etch  

MULTIPLE UNITS AVAILABLE:  Please inquire.

remarketing@surplusglobal.com

 

1   Dresden, Saxony
212268
Applied Materials  

Applied Materials  

Centura AP  

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Applied Materials, Centura AP, 300mm, Etch, AdvantEdge G5:

Applied Materials, Centura AP, 300mm, Etch, AdvantEdge G5

4 Chambers

In the Fab, Connected.

2010 Vintage

S/N : 422049

Bitline etch. 

 

 

1   Dresden, Saxony
178357
AMAT  

AMAT  

Centura 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Applied Materials, Etch, Centura Carina Chamber 300mm:

Tool ID : ETX2291-c

Chamber Only.
Carina Etch Chamber.
 Chamber Materials: ADVANCED CERAMIC
Lid Materials:  AG 1000
Process Ring: QUARTZ SINGLE RING
Plasma Exposed Chamber Oring: KALREZ
Cathode Temperature Range: 130 TO 250C
Carina Etch Swap Kit: 1
Chamber Viewport: STANDARD VIEWPORT
Endpoint Type: EyeD IEP
CCM Cover: NO



Location is Malta, NY.

 

1   F* Malta, New York
204490
Applied Materials  

Applied Materials  

Olympia ALS 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Applied Materials, Olympia, SiN, LowK, ALD, 300mm:

Applied Materials, Olympia, SiN, LowK, ALD, 300mm

Single Chamber

In the fab. Warm idle

S/N: 430766

2015 Vintage

remarketing@surplusglobal.com

 

1   Malta, New York
215018
Applied Materials  

Applied Materials  

Producer GT  

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Applied Materials, Producer GT, 300mm, Frontier Etch, Nitride Poly :

Applied Materials, Producer GT, 300mm, Frontier Nitride Poly Etch

3 Chamber: 1x SiCoNi PME, Frontier SMR Nitride, Frontier SMR Poly

S/N : 430632

Vintage : 2015 

Installed

 

1   Malta, New York
215019
Applied Materials  

Applied Materials  

Producer GT Frontier 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Applied Materials, Producer GT, 300mm, Frontier Nitride Poly Etch:

Applied Materials, Producer GT, 300mm, Frontier Nitride Poly Etch

3 Chamber: 1x SiCoNi PME, Frontier SMR Nitride, Frontier SMR Poly

S/N : 432990

Vintage : 2016 

Installed

 

1   Malta, New York
215337
Applied Materials  

Applied Materials  

Producer GT Frontier 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Applied Materials, Producer GT, 300mm, Frontier Nitride Poly Etch:

Applied Materials, Producer GT, 300mm, Frontier Nitride Poly Etch

3 chamber ProducerGT Etch. 

 

 

1   Malta, New York
215020
Applied Materials  

Applied Materials  

Producer GT Frontier 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Applied Materials, Producer GT, 300mm, Frontier SMR Poly:

Applied Materials, Producer GT, 300mm, Frontier SMR Poly

2 Chamber: 1x SiCoNi PME,  Frontier SMR Poly

S/N : 435695

Vintage : 2017 

Installed

 

1   Malta, New York
199968
Semitool  

Semitool  

RAIDER sp312 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Applied Materials, Semitool, Raider SP312, Bevel Edge Clean, 300mm:

Applied Materials, Semitool, Raider SP312, Bevel Edge Clean, 300mm

Cold Shutdown,  In the FAB.

Non Working Condition =>  WIP controller (PC) is faulty and upgrade required. Chamber of CP7, CP8 (PEC) are currently not functionally with alarm: spin amplifier failure. Filter housing and bracket for T1 (HF49%) are missing parts as parts are corroded and damaged.

S/N: T239001

remarketing@surplusglobal.com

1   Singapore
201133
Applied Materials  

Applied Materials  

Vantage 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

Applied Materials, Vantage, Vulcan, RTP, 300mm :

Applied Materials, Vantage,  Vulcan, Spike RTP, 300mm 
2 Chamber System

S/N : 426995

 

 

remarketing@surplusglobal.com

1   F* Dresden, Saxony
201134
Applied Materials  

Applied Materials  

Vantage Vulcan 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

Applied Materials, Vantage, Vulcan, RTP, 300mm :

Applied Materials, Vantage, Vulcan, RTP, 300mm 
2 Chamber System

 

G3 server system.

S/N : 429402

 

remarketing@surplusglobal.com

 

1   F* Dresden, Saxony
208202
ASM  

ASM  

Epsilon 3200 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

ASM Epsilon 3200 (Infineon EPI42):

ASM Epsilon 3200 build in 2010 with Asyst Handler

300mm tool in excellent condition

Still installed in a cleanroom in our site Villach/Austria. Full inspection possible.

Was used with Arsen and will decontaminated before de-Installation. 

This is one of two available tools

Please feel free to arrange an inspection date for both.

Infineon internal ID: EPI 42    Please note kindly the ET Item ID: 208202

Sale is offered on condition as and where is

 

1   Regensburg, Bavaria
207160
ASM  

ASM  

E3200 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

ASM, E3200 Reduced Pressure, 300mm, S/N 1E0342200:

ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System E3200 RP

 

Crated and in warehouse since 7 Apr 2021.

 

remarketing@surplusglobal.com

1   Dresden, Saxony
202901
ASM  

ASM  

Eagle XP8 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

ASM, EAGLE XP8, 300mm, CVD, PEALD HT/LT SiO:

ASM, EAGLE XP8, 300mm, CVD, PEALD HT/LT SiO

 

Crated in the Warehouse

remarketing@surplusglobal.com

 

1   Dresden, Saxony
202902
ASM  

ASM  

Eagle XP8 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

ASM, EAGLE XP8, 300mm, CVD, PEALD HT/LT SiO:

ASM, EAGLE XP8, 300mm, CVD, PEALD HT/LT SiO

 

remarketing@surplusglobal.com

1   Dresden, Saxony
221001
ASM  

ASM  

Epsilon 3200 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

ASM, Epsilon 3200, 300mm, S/N 033890:

ASM, Epsilon 3200, 300mm, S/N 033890

No Quartz chamber.

1   Dresden, Saxony
221381
ASM  

ASM  

P8300 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

ASM, Polygon P8300, 300mm, S/N 083380, Mainframe only.:

ASM, Polygon P8300, 300mm, S/N 083380

Mainframe only, no chambers.

1   N* Dresden, Saxony
178965
Axcelis Technologies  

Axcelis Technologies  

Optima HDxT 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Axcelis Optima HDxT, Ion Implanter, 300mm, :

300mm ion implanter, spare beam tunnel, SRA, PFG, source, manipulator, bushing source flange adapter, source turbo exhaust line, and . chamber liners.

Axcelis Optima HDxT
 
Roughing Pumps:
Edwards IGX100L
Edwards iGX100M
Edwards iGX600M
 
Cryo Pumps:
Qty (2) Brooks: 320FE
Qty (1) Brooks: 250FE
 
Turbo Pump
TP1: Edwards STP-XA2703CV
TP2: Edwards STP-A1303CV
 
Chillers: 
Affinity J Chiller Model: GWN-ZRMK-BE55CBS6
Affinity F-Series Model: FWA-032K-DD19CBD4
 
Cryo Compressors:
Qty (2) Brooks: IS-1000
 
 
*****************************
Known Missing Parts
Part DescriptionQty
Robot pick on transfer arm.1
Cryo Compressor2
Docking Plate1
12V batteries for EOM circuit2
Solenoid block for the loadports3

 

remarketing@surplusglobal.com

 
1   F* Malta, New York
221380
Axcelis Technologies  

Axcelis Technologies  

Optima MD 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Axcelis, Optima MD, 300mm, S/N 083016:

Axcelis, Optima MD, 300mm, S/N 083016

Medium current.

1   N* Dresden, Saxony
209643
Axcelis Technologies  

Axcelis Technologies  

Summit 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

Axcelis, Summit, 300mm, RTP:

Axcelis, Summit, 300mm, RTP

 

Missing many parts. 

Inspection strongly advised.

1   East Fishkill, New York
209907
Axcelis Technologies  

Axcelis Technologies  

Summit RTP 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

Axcelis, Summit, 300mm, RTP:

Axcelis, Summit, 300mm, RTP

 

Multiple missing parts.

Inspection strongly advised.

1   East Fishkill, New York
216477
CANON EUROPA NV  

CANON EUROPA NV  

FPA-5500iZa 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon Stepper FPA-5500iZa:
  • Tool in good condition
  • Inspected by OEM, Inspection report attached (see below)
  • Lense need repair
  • Serialnumber: 5057004
  • Tool build up in cleanroom, ready for inspection
  • Pictures represent current build up status of the tool
1 666,809.94 F* Regensburg, Bavaria
221092
Ebara  

Ebara  

FREX300S 

List all items of this typeCMP Polishers

in Chemical Mechanical Planarization Equipment

CMP_EBARA_FREX300S:

Tool complete (except former Nova Measurement Unit), “Jigs and Tools" package missing

“NOVA readiness” integration

Wafer size 12"

Last time in production 04/2021. Tool still powered but ready for de-installation

Manuals available

Spare Parts partly available

OEM refurbished demo tool

Manuals digital available

Many extensions. E.g. Nova Ready, IPA dryer, SOPM Platen A, RECM Platen C)

We see the fair market value around 470k$ (as and where is) and would be happy for every offer between 325k$ and 525k$. The tool will be sold for the highest offer.

 

1   N* Dresden, Saxony
217146
Silicon Valley Group  

Silicon Valley Group  

SVG8600 

List all items of this typeSolvent Wet Stations

in Wet Processing Equipment

1   Temecula, California
212134
DMS  

DMS  

Tornado 200 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

DMS, Brooks, Tornado 200, 200mm, Cleaning System, :

DMS, Brooks, Tornado 200,  Cleaning System, 

Centrifugal Force Photomask Container Cleaner

Installed, Operational.

S/N : 4246

1   Burlington, Vermont
218703
Dainippon Screen  

Dainippon Screen  

FC3000 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

DNS, FC3000, 300mm, S/N 630300158A:

DNS, FC3000, 300mm, S/N 630300158A, RCA bench

1   Singapore
202651
Aixtron  

Aixtron  

Aixtron AIX2800G4 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

EPI Aixtron G4:

With many spare parts.

1   Villach, Carinthia
210404
Suss MicroTec  

Suss MicroTec  

Falcon Polyimid Developer 

List all items of this typeStandard Photoresist DevTracks

in Photoresist Develop Track Systems

Fairchild Developer Ent3C:

Developer with 2 chambers for spray developing.

 

1   Villach, Carinthia
208828
Tokyo Electron Limit  

Tokyo Electron Limit  

FSI Orion 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

FSI Orion, TEL, 300mm, Surface Preparation:

FSI Orion, TEL, 300mm, Surface Preparation

 

Installed.  Idle.

 

1   Malta, New York
208826
Tokyo Electron Limit  

Tokyo Electron Limit  

FSI Orion 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

FSI Orion, TEL, 300mm, Surface Preparation:

FSI Orion, TEL, 300mm, Surface Preparation

Installed.  Idle.

 

1   Malta, New York
208827
Tokyo Electron Limit  

Tokyo Electron Limit  

FSI Orion 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

FSI Orion, TEL, 300mm, Surface Preparation Installed. Idle.:

FSI Orion, TEL, 300mm, Surface Preparation

Installed.  Idle.

 

1   Malta, New York
196207
FSI  

FSI  

Scorpio 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

FSI, Scorpio, Wet Developer, 200mm,:

FSI, Scorpio, Wet Developer, 200mm,

S/N : S-0849

!! Multiple Units Available !!  Please inquire.


1   East Fishkill, New York
218247
Bruce (BTI)  

Bruce (BTI)  

BDF-41 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

Furnance BDF-41 Ofen 29B:

Diffusion Furnance for atmospheric oxid processes.

Tube 4 is LPCVD

1   Villach, Carinthia
183751
GTX Marketing  

GTX Marketing  

Wet Bench 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

GTX Marketing, 200mm, Wet Sink, Support:

GTX Marketing, 200mm, Wet Sink, Support

Tool ID: CPWS-01

1   Singapore
219849
Kokusai  

Kokusai  

DJ-1206VN-DM 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

Hitachi Kokusai, DJ-1206VN-DM, 300mm, S/N T2DC6-12427-1, LPCVD Nitride:

Hitachi Kokusai, DJ-1206VN-DM, 300mm, S/N T2DC6-12427-1, LPCVD Nitride

Tool is available as of 18 Feb 2021 for sale.

But the tool will be shipped to warehouse on 22 Mar 2021 for storage.

remarketing@surplusglobal.com

1   Singapore
204280
Hitachi  

Hitachi  

M-8190XT 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Hitachi, M-8190XT, 300mm, Plasma Etch:

Hitachi, M-8190XT, 300mm, Plasma Etch

3 Chambers

In Fab, Warm Idle

1   Malta, New York
210071
ITS  

ITS  

Single Mix Tank 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

ITS, Single Mix Tank, CHEMICAL MIXER STATION :

ITS,  Single Mix Tank, CHEMICAL MIXER STATION 

 

Installed.  Idle.

1   East Fishkill, New York
212147
KLA-Tencor  

KLA-Tencor  

SLF576, TeraScan 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

KLA-Tencor, Starlight, SLF576, TeraScan, Reticle Inspection Tool, :

KLA-Tencor, SLF576, TeraScan, Reticle Inspection Tool, 

 

Known Faulty parts:

Part NumberDescriptionQTY
 Laser head1
 Boxster board2
 UIC1 power supply1
 Fork assembly1
 IAF preamp enclosure1
740-393655-000FRU,MODULE BEAM STAB1
740-393658-000FRU,MODULE HOMOGENIZ1
0252978-003FRU,MODULE,DIFFUSER,XR,5XX1
740-393656-001FRU,MODULE LIGHT LEVEL / CTRL,5XX1

 

 

 

S/N : 5XX 5016

 

remarketing@surplusglobal.com

1   Singapore
190993
Kokusai  

Kokusai  

Quixace Ultimate 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF:

Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF

Low Temp Steam Anneal - for SOD Cure

S/N: T2DD6-18711

 

 

remarketing@surplusglobal.com

1   Malta, New York
190750
Kokusai  

Kokusai  

DD-1223VN 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

Kokusai Quixace, 300mm, DD-1223VN, ALD-TiN:

Kokusai Quixace, 300mm, DD-1223VN

ALD-TiN 

S/N T2DC6-16441

 

 

remarketing@surplusglobal.com

1   Malta, New York
204501
Kokusai  

Kokusai  

DJ-1206VN-DM, 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

Kokusai Quixace, 300mm, DJ-1206VN-DM,:

Kokusai Quixace, 300mm,

LPCVD SiN,

 

S/N : T2DC6-12825

Bagged & Skidded in warehouse

 

1   Singapore
204500
Kokusai  

Kokusai  

DJ-1206VN-DM 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

Kokusai Quixace, 300mm, DJ-1206VN-DM, LPCVD SiN:

Kokusai Quixace, 300mm, DJ-1206VN-DM,

LPCVD SiN

S/N : T2DC6-12462

Bagged & Skidded in Warehouse

 

1   Singapore
205392
Kokusai  

Kokusai  

DJ-1206VN-DM 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

Kokusai Quixace, 300mm, DJ-1206VN-DM, LPCVD SiN:

Kokusai Quixace, 300mm, DJ-1206VN-DM,  LP SiN 

 

Bagged & Skidded in Warehouse.

 

remarketing@surplusglobal.com

 

1   Singapore
208405
Kokusai  

Kokusai  

Quixace 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

Kokusai, Quixace, 300mm, Anneal, Cobalt :

Kokusai, Quixace, 300mm, Anneal, Cobalt 

In the Fab.  Idle.

DOM : 2014

S/N : T2DD6-18973-1

 

remarketing@surplusglobal.com

 

1   F* Malta, New York
201495
Mattson Technology  

Mattson Technology  

Helios 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

Mattson, Helios, 300mm, RTP:

Mattson, Helios, 300mm, RTP

S/N : 2006011107

In Fab - Production

 

Quartz Process kits for the chamber will be included in sale.

1   Singapore
208211
Mattson Technology  

Mattson Technology  

MILLIOS  

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

Mattson, Millios, HVM, 300mm, Millisecond Anneal System:

Mattson, Millios, HVM, 300mm, Millisecond Anneal System

DOM : 2012 

Installed, connected, idle.

 

S/N :  11043001, 09130001, 09250001

 

remarketing@surplusglobal.com

 

 

1   Malta, New York
203143
Steag  

Steag  

300mm TiW Wet Etch Tool 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Mattson, Steag, TiW Wet Etch Tool, 300mm, :

Mattson, Steag, TiW Wet Etch Tool, 300mm, 

 

Installed.  Power off.

 

1   East Fishkill, New York
182331
Steag-Mattson  

Steag-Mattson  

TiW Etch Tool 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Mattson, Steag, TiW Wet Etch Tool, 300mm, :

TiW Wet Etch Tool, Steag, Mattson, 300mm

This tool had two heated TiW Etch tanks, with a quick dump rinse and hot run rinse per tank. It also has two nitrogen dryers. It chemically etched wafers with an active peroxide solution and used a impedance measurement across the wafer to verify etch end­point was reached. The tool was automated to take wafers out of FOUPs and load them into etch racks which were then each moved through a series of tanks. Data collection and SECS GEM is available. *Tool configuration/specification details. (Potential sources are original quotes, configuration

1   Fishkill, NY
191539
Nanometrics  

Nanometrics  

Q200I 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Nanometrics, Q200I, 200mm,:

Nanometrics, Q200I, 200mm,
Biorad Overlay Tool

 

Bagged & Skidded in Warehouse.

!!!MULTIPLE UNITS AVAILABLE!!!  PLEASE INQUIRE

S/N: 200-00-11-02

remarketing@surplusglobal.com

 

1   Singapore
191540
Nanometrics  

Nanometrics  

Q200I 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Nanometrics, Q200I, 200mm,:

Nanometrics, Q200I, 200mm,

Biorad Overlay Tool

S/N: QS2216

 

remarketing@surplusglobal.com

 

1   Singapore
220432
Nikon  

Nikon  

NSR-207D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

Nikon, NSR-207D, 300mm, S/N 8632034:

Nikon, NSR-207D, 300mm, S/N 8632034

Excimer laser (model number ELS 7410L) are included in this sale.

 

remarketing@surplusglobal.com

1   F* Singapore
220774
Novellus Systems  

Novellus Systems  

C3 Speed 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Novellus, C3 Speed chms, 300mm, S/N D14071A:

Novellus, C3 Speed chms, 300mm, S/N D14071A

Serial number belongs to main tool.

Only chms, RF gen racks and chillers sold here.

1   Singapore
213693
Novellus Systems  

Novellus Systems  

Sabre NeXT 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Novellus, Sabre NeXT, Cobalt Plating system, 300mm:

Novellus, Sabre NeXT, Cobalt Plating system, 300mm

In Fab.  Idle.

S/N : SBR-398

1   F* Malta, New York
199832
Applied Materials  

Applied Materials  

P5000 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

P5000 Deposition Tool:

P500047

4 Chambers
CVD standard Chambers 
SNIT

1   Villach, Carinthia
219065
Applied Materials  

Applied Materials  

P5000 

List all items of this typeCluster PECVD Tools

in Production Tools

P5000 Deposition Tool P500030:

P500030

Teos Prozess

We sell this tool without chambers.

1   Villach, Carinthia
209403
Applied Materials  

Applied Materials  

P5000 

List all items of this typeCluster PECVD Tools

in Production Tools

P5000 Depositiontool :

P500020

CVD Tool with 4 Chambers
2 Chambers Etch, 2 Chambers CVD
SILAN

1   Villach, Carinthia
209423
Applied Materials  

Applied Materials  

P5000 

List all items of this typeCluster PECVD Tools

in Production Tools

P5000 Depositiontool P500045:

P500045

4 Chambers
2 Chambers Etch, 2 Chambers CVD
Teos

1   Villach, Carinthia
209425
Applied Materials  

Applied Materials  

P5000 

List all items of this typeCluster PECVD Tools

in Production Tools

P5000 Depositiontool P500049:

P500049

4 Chambers
2 Chambers Etch, 2 Chambers CVD
Teos

1   Villach, Carinthia
213168
Peter-Wolters  

Peter-Wolters  

Gemini P200 

List all items of this typeCMP Polishers

in Chemical Mechanical Planarization Equipment

Peter Wolters Gemini P200:

8" Wafersize; Cleanertype: SSEC, different upgrades (e.g. McMillan Flowcontroller instead Slurrypump)

Last Process: Tungsten-Polish

 

1 99,000.00 F* Dresden, Saxony
201546
Applied Materials  

Applied Materials  

Producer GT Chamber 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Producer GT, AMAT, 300mm, CVD, Cobalt Chamber Only :

Producer GT, AMAT, 300mm, CVD, Cobalt Chamber  Only 

In the fab, Idle

S/N : 428357-DG-ACHA

 

MISSING PARTS

UPS batteries or battery packQty  / Units
missing door interlock magnet mounting nuts2
Needs GUI software work. Comes up only in safe mode. Does not follow commands1
Needs LCF1
Missing chamber A/C box cover1
Missing S1 S2 chamber wafer heater1
Missing S1 S2 heater lift mechanism1
Missing S1 S2 heater lift driver, lead screw, motor1
Several cables not connected1
top plate LL1
liner LL1
Gas distribution plate APC1
Bucket LL1
Edge ring large1
Edge ring small1
lock nut quartz tube1
tube liner AX7670 APC 300 mm Quartz tube1
STP-iXR1606 Turbo pump shutting off after few seconds . Turbo having hw problems1
Dump DI water from S1 and S2 DI water container1
S1 H2O MFC 20 sccm1
Missing DI water container cover1
RPS disconnected1
S1 lift controller not attached1
Needs LCF and Chamber D handoffs1
ChD side1 lift not mounted, harness has pulled wires1
Needs new indexer connector for side 11
FI lower LL door will not shut when commanded1
ChD water ampoules installed but nothing connected/plugged in1
ChD RPS units power not connected1

Needs LCF and  chambers handoffs for all chambers

 

1
1   Malta, New York
205866
Semitool  

Semitool  

ACMS XT II 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Semitool, ACMS XT II, Cu Plating Bath Analyzer:

Semitool, ACMS XT II, Cu Plating Bath Analyzer

 

In the Fab, connected, idle.

1   Dresden, Saxony
205867
Semitool  

Semitool  

ACMSOXT-AGS-E 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Semitool, ACMS0XT-ASG-E, Plating Bath Replenisher :

Semitool, ACMS0XT-ASG-E, Plating Bath Replenisher 

 

In Fab, Idle.

1   Dresden, Saxony
199708
Applied Materials In  

Applied Materials In  

Raider ECD 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Semitool, Plating, Raider ECD 300mm:

Semitool, Plating, Raider ECD 300mm

1   Dresden, Saxony
201204
Semitool  

Semitool  

ECD310 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Semitool, Plating, Raider ECD 310 300mm:

Semitool, Plating, Raider ECD 310 300mm

S/N : 239180

 

remarketing@surplusglobal.com

1   Dresden, Saxony
201206
Semitool  

Semitool  

Raider ECD 310 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Semitool, Plating, Raider ECD 310 300mm:

Semitool, Plating, Raider ECD 310 300mm

S/N : 239151

 

remarketing@surplusglobal.com

1   Dresden, Saxony
202876
Semitool  

Semitool  

Spectrum 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Semitool, Spectrum, 200mm, Spray Clean Polymer removal system:

Semitool, Spectrum, 200mm, Spray Clean Polymer removal system

 

Release Q3 2019 

 

In the fab

 

1   Singapore
209829
Semitool  

Semitool  

Spectrum300 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Semitool, Spectrum, 200mm, Spray Clean Polymer removal system:

Semitool, Spectrum, 200mm, Spray Clean Polymer removal system

In the Fab.  Idle

1   Malta, New York
219066
Shibaura  

Shibaura  

CDE300 

List all items of this typeCluster Plasma Tools - Metal

in Cluster Plasma Tools

Shibaura CDE300 :

CDE301

Plasma Etch Tool for SI Grieß, SNIT, Imid, Titan, Tungsten

1   Villach, Carinthia
209918
Shibaura  

Shibaura  

CDE300 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Shibaura, CDE300, 300mm, Isotropic Chemical Dry Etch:

Shibaura, CDE300, 300mm, Isotropic Chemical Dry Etch

 

remarketing@surplusglobal.com

1   East Fishkill, New York
209402
Sokudo  

Sokudo  

DT-3000 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

Sokudo, DT-3000, SOH Coater, 300mm, Resist/Poly Spin coater:

Sokudo, DT-3000, SOH Coater, 300mm, Resist/Poly Spin coater

In the fab.  Cold.

DUO 4 CUP + 12 PCDH + 6 CP 4 CUP + 12 PCDH + 6 CP

 

remarketing@surplusglobal.com

 

 

1   Malta, New York
204929
Sokudo  

Sokudo  

DT-3000 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

Sokudo, DT-3000, SOH Coater, 300mm, Resist/Poly Spin coater:

Sokudo, DT-3000, SOH Coater, 300mm, Resist/Poly Spin coater

DUO 4 CUP + 12 PCDH + 6 CP 4 CUP + 12 PCDH + 6 CP

 

S/N: T00C00082A

 

remarketing@surplusglobal.com

1   Malta, New York
210236
Sokudo  

Sokudo  

DUO 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

Sokudo, DUO, SOH Coater, 300mm, Resist/Poly Spin coater:

Sokudo, DUO, SOH Coater, 300mm, Resist/Poly Spin coater

DUO 4 CUP + 12 PCDH + 6 CP 4 CUP + 12 PCDH + 6 CP

Unhooked.  In Fab.

S/N : T00C00186A

remarketing@surplusglobal.com

 

 

1   Malta, New York
218898
Unaxis  

Unaxis  

CLC200 

List all items of this typeCluster Sputtering Tools

in Single Wafer Sputtering Tools

Sputtertool Clusterline Unaxis:

CL-MET-04

Sputtertool with 6 chambers

1   Villach, Carinthia
204404
Steag  

Steag  

ElectroDep 2000 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

STEAG, ElectroDep 2000, Pb/Sn Plating Tool, 200mm:

STEAG, ElectroDep 2000, Pb/Sn Plating Tool,

 

Installed. Cold Idle

2000 Vintage

1   F* East Fishkill, New York
203128
Steag-Mattson  

Steag-Mattson  

300 mm TIW Tool 2 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

1   East Fishkill, New York
220473
Tokyo Electron Limit  

Tokyo Electron Limit  

ACT12 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL, ACT12, 300mm, S/N E240882:

TEL, ACT12, 300mm, S/N E240882

 

remarketing@surplusglobal.com

1   F* Singapore
220472
Tokyo Electron Limit  

Tokyo Electron Limit  

ACT12 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL, ACT12, 300mm, S/N E250934 :

TEL, ACT12, 300mm, S/N E250934 

 

remarketing@surplusglobal.com

1   Singapore
210239
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly:

TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly

S/N ; L000005Y5359

Bagged & Skidded in Warehouse

 

 

remarketing@surplusglobal.com

1   Singapore
204306
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Certas LEAGA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

TEL, Etch, 300mm, Certas LEAGA:

TEL, Etch, 300mm, Certas LEAGA

 

 

remarketing@surplusglobal.com

1   Malta, New York
201830
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Telius SP 305 SCCM 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

TEL, Etch, Telius SP 305 SCCM TE 300mm:

TEL, Etch, Telius SP 305 SCCM TE 300mm

 

S/N : H01378

 

remarketing@surplusglobal.com

1   Busan, Busan
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*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Wafer Fabrication Equipment:
Accent Optical, Adixen, Aixtron, Akrion, Applied Materials Inc., Applied Materials, Inc., ASM, Axcelis Technologies GmbH, Bruce (BTI), CANON EUROPA NV, Dainippon Screen Mfg. Co., Ltd., DMS, Ebara, FSI, GTX Marketing, Hitachi, ITS, KLA-Tencor, Kokusai, Mattson Technology, Nanometrics, Nikon, Novellus Systems, Peter-Wolters, Semitool, Shibaura, Silicon Valley Group, Sokudo, Steag, Steag-Mattson, Suss MicroTec, Tel, Tokyo Electron Limited, Tokyo Electronics Limited, Unaxis, Universal Plastics Corporation