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Item ID  Photo Short Description Product Type / Details # Price Notes Location Make Model   $   257348 AMAT   AMAT   DXZ/CXZ Chamber  Cluster PECVD Tools in Production Tools 3 DXZ/CXZ Chambers for Centura/P5000: 3 DXZ/CXZ Chambers for Centura/P5000 Mainframe is transport rack   1   Villach, Kärnten 256502 LAM Research Corp.   LAM Research Corp.   Allian  Cluster Plasma Tools - Oxide in Cluster Plasma Tools 1   Villach, Carinthia 252024 Applied Materials   Applied Materials   200mm Centura II  Cluster Plasma Tools - Other in Cluster Plasma Tools AMAT 200mm Centura II DXZx: Centura MF II Software: Vita Controller Indexer: Narrow Body / Tilt out mit Dummy Wafer Storage Robot: HP+ Chamber: A -> DPS+ B -> DPS+ C -> IPS D -> ASP+ E -> Single Cooldown F -> Orienter 1   Regensburg, Bavaria 239336 AMAT   AMAT   Centura EPI 8 inch  Epitaxial Cluster Tools in Epitaxial Reactors AMAT Centura EPI 8 Zoll (#402): The system was completely overhauled by us with external service AMAT on site at that time!; Blower controls upgraded every 3 chambers; Approximately 4 years ago the Complete Gas Cabinet was upgraded from Legaty to Universal Gas Cabinet on site with the FA. AMAT upgraded costs €0.5 million; The facility has proprietary Modorized Lift 3x;     1   Regensburg, Bavaria 256746 AMAT   AMAT   HDP Centura  Cluster PECVD Tools in Production Tools AMAT Centura HDP: Software: Win 10 OR 4000 WTM Controller 3x ENI Generator Racks Chiller INR-498-011D 2x Remote Monitor High Density Plasma Process Process Chambers: A,B,C Orienter chamber F 1   Regensburg, Bavaria 256339 Varian   Varian     Medium Current Implanters in Ion Implantation Equipment Amat E500: -Back end medium current Implanter   - 100002956 1   Kulim, Kedah 259241 AMAT   AMAT   Back end Implanter Amat E500  High Current Implanters in Ion Implantation Equipment AMAT E500: › Original Equipment Manufacturer? (Yes/No, if no please state the details )  Yes › Exact Model Type? (Yes/No, if no please state the details )  E500 EHP › OEM Serial ID? ES193741 U2 › Completeness: Total/partial/Donor tool? Please list missing parts. Total › Date of first usage? NA › Technic special customized for Infineon? NA › Correct maintained? Yes › Any damages/deficits known? No › Manuals existing? No › Crated: If yes…/ professional with protocol / partly / simple? No › Detailed Configuration/Specification of the tool   › Any upgrades / extensions? Thin Wafer handling kit, Hydrogen implant, LX upgrade, Windown 7 OS › Useable for which products? 8"  Thin Taiko wafers › Wafer size (if applicable)? 200mm › Any consumables at end of lifetime? Yes (source, electrode) › Procured from OEM or from second hand? From IR Singapore › Any refurbishments done? No › Any doubts that the tool is failure free useable for the next three years? Yes › Was there a significant system failure in the last three years? No › Any contaminations known? BF3, H2 › IFX inventory 200016809 > Location INFINEON KULIM FAB 2 LEVEL 3 PRODUCTION AREA CLEANROOM   1   N* Kulim, Kedah 255502 ASM   ASM   Advance 400  Vertical Diffusion Furnaces in Diffusion Furnaces ASM Furnace Advance - OFENV06C: ASM Furnace Vertical - Advance 400 2 Reactors atmospheric   1   Villach, Carinthia 255500 ASM   ASM   Advance 400  Vertical Diffusion Furnaces in Diffusion Furnaces ASM Furnace Vertical - OFENV01D: OFENV01D Furnace with 2 Tubes 1x Reactor Dot. Poly Low Pressure 1x Reactor Atmosphere WET-OXID 1   Villach, Carinthia 255501 ASM   ASM   Advance 400  Vertical Diffusion Furnaces in Diffusion Furnaces ASM Furnace Vertical - OFENV05C: ASM Furnace Vertical - Advance 400 2 Reactor atmospheric Robot defect and need service  1   Villach, Carinthia 255503 ASM   ASM   Advance 400  Vertical Diffusion Furnaces in Diffusion Furnaces ASM Furnace Vertical OFENV06D: ASM Furnace Vertical - Advance 400 2x Reactor Dot. Poly Low Pressure 1   Villach, Carinthia 255504 ASM   ASM   Advance 400  Vertical Diffusion Furnaces in Diffusion Furnaces ASM Furnace Vertical OFENV07C: ASM Furnace Vertical  2 Reactor atmospheric Reactor 1 is missing heater cassette, Motor driver, Board and loader arm   1   Villach, Carinthia 252684 AXCELIS NV8200P  AXCELIS NV8200P  Medium Current Implanters in Ion Implantation Equipment AXCELIS NV8200P: -MCINV8201 › Original Equipment Manufacturer? Axcelis › Exact Model Type? AXCELIS MEDIUM CURRENT NV8200 › OEM Serial ID? › Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool. › Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers. › Manufacturing date of the Equipment ? › Date of first usage? 2006 › Technic special customized for Infineon? We don’t use water cool for the platen. › Correct maintained? Yes. › Any damages/deficits known? No › Manuals existing? Yes. › Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled. › Any upgrades / extensions? No. › Useable for which products? 8 inch product › Wafer size (if applicable)? 8 inch › Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer. › Procured from OEM or from second hand? Second hand. › Any refurbishments done? No. › Any doubts that the tool is failure free useable for the next three years? No. › Was there a significant system failure in the last three years? No. › Any contaminations known? No › IFX Inventory number? 100000605 1   Kulim, Kedah 252685 AXCELIS NV8200P  AXCELIS NV8200P  Medium Current Implanters in Ion Implantation Equipment AXCELIS NV8200P: MCINV8202 › Original Equipment Manufacturer? Axcelis › Exact Model Type? AXCELIS MEDIUM CURRENT NV8200 › A pictures say more as 1.000 words. Any pictures available? Please provide as much as possible. › Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool. › Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers. › Date of first usage? 2006 › Technic special customized for Infineon? We don’t use water cool for the platen. › Correct maintained? Yes. › Any damages/deficits known? No › Manuals existing? Yes. › Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled. › Any upgrades / extensions? No. › Useable for which products? 8 inch product › Wafer size (if applicable)? 8 inch › Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer. › Procured from OEM or from second hand? Second hand. › Any refurbishments done? No. › Any doubts that the tool is failure free useable for the next three years? No. › Was there a significant system failure in the last three years? No. › Any contaminations known? No › IFX Inventory number? 100001850 1   Kulim, Kedah 256469 Axcelis/Eaton   Axcelis/Eaton   NV8250HT  Medium Current Implanters in Ion Implantation Equipment Axcelis NV8250HT #941: Equipment Konfiguration:   Type: NV8250HT Energy Config: 0 - 250Kv Midcurrent Serialnumber: 908 Build Year: 2002 Date of first usage: buyed new from vendor Current Condition:  Good CE-Conformity: Yes Location: greyroom Voltage: 208V Cryo-Pumps: 3x CTI/Edwards Onboard: OB-8 Cryo-Kompressor: CTI 9650 Low-Voltage Turbo-Pumps: Seiko/Edwards: STP1003C, STP-301C, STP-1003C Rough-Pumps: Edwards: without QDP40, not included Endstation Rough-Pump: not included Wafersize: 8inch(200mm) Clamp-Type: E-Chuck green with Non-µC Controller Wafer-Cooling: Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear) Gasbox: Modular 5-String, 4x 2,0L Size String1: Argon Carriergas; MFC Unit-1662 2sccm BF3 String2: BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3 String3: condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3 String4: AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3 String5: PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3 Beam-Profiler Type: Belt-Drive Gear-Type's: Scan: Planetary  Tilt: Planetary Source-Type: ELS4 IHC-Source without Vaporizer HV-Transformer: Silicon-Oil Light-Tower: red/yellow/green; no buzzer Main-Workstation Solaris SUN AXI 3HE (Special case) Second-Workstation Solaris SUN Sparc5 Software-Version: 5.1.4.1 Network: 24port 100MB Ethernet with Cisco Router-Kit Cell-Controller: 177 Type Notes: Upper-Rack Panel missing   Clean-Room Table missing on frontside   all 4 wheels on oil-isolation transformer are broken   Minor modifications on tool   No Manual-Set/ no Spares include   tool was used 24/7 full in production between 15 and 230kv Energy   If required, tool can be inspected on site, but no Power 1   Regensburg, Bavaria 250598 Axcelis Technologies   Axcelis Technologies   OPTIMA_HD  High Current Implanters in Ion Implantation Equipment 1   Dresden, Saxony 250700 Canon   Canon   3000i4  I-Line Wafer Stepper in Wafer Steppers Canon FPA 3000 i4 Stepper : Only for sale for an competetive price!   Configuration: left inline system; 8" wafer chuck; Nikon Type Reticle changer; 6" Reticle major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT Hg lamp will be removed prior shipping Coolant will be removed prior shipping Batteries will be removed prior shipping no UPS installed. No printer installed. No MO-drive EOL: optical parts  Last Time in production: 05/24   1   Dresden, Saxony 250701 Canon   Canon   3000i4  I-Line Wafer Stepper in Wafer Steppers Canon FPA 3000 i4 Stepper : Configuration: left inline system; 8" wafer chuck; Nikon Type Reticle changer; 6" Reticle major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT Hg lamp will be removed prior shipping Coolant will be removed prior shipping Batteries will be removed prior shipping no UPS installed. No printer installed. No MO-drive EOL: optical parts  Last Time in production: 05/24   1   Dresden, Saxony 251212 Eaton   Eaton   GSD200E/80  High Current Implanters in Ion Implantation Equipment Eaton GSD200E/80 Highcurrent #816: Energy Config: 0 - 80Kv Highcurrent Serialnumber: 80517 Build Year: 2000 Date of first usage: begin of year 2001 Current Condition:  Good CE-Conformity: Yes Cryo-Pumps: CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!! Cryo-Kompressor: CTI 9650 Low-Voltage Turbo-Pumps: Seiko STP A2203 fully refurbed included!! Terminal-Rough-Pump: without (Edwards Config) Endstation Rough-Pump: without (Edwards Config) Wafersize: 200mm Disk-Type: Si-coated Disk fully refurbed included!! Wafer-Cooling: no Disk-Chiller included ! Gasbox: 5-String, 4x Toxic-Low-Pressure String1: PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3 String2: BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3 String3: AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3 String4: SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3 String5: Argon Carriergas; MFC Brooks GF120 10sccm-N2 Disk-Drive: Direct-Drive Dose-Type: Regular Source-Type: ELS4 IHC-Source without Vaporizer Hghvoltage-Transformer: Oil Light-Tower: red/yellow/green; no buzzer Main-Workstation SUN Solaris AXI 3HE Second-Workstation without Software-Version: 6.13.5.1 (no license included) Network: 24port 100MB Ethernet with Cisco Router-Kit Cell-Controller: V6 Type Condition tool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024 Availability Immediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. Depending on the availability of external service providers Notes: slight corrosion spots on the frame, just a visual matter, see IMG_0810_n.jpg   Clean-Room Table on frontside not included   Original Lower Machine Front Panels not included (below the Table)   Rough-Pumps not included   Endstation Flowhood not included   Disk-Chiller not included   modified Plasma-Gun Power-Supply installed(TDK)   Minor modifications on tool   No Manual-Set/ no Spares   If required, tool can be inspected on site 1   Regensburg, Bavaria 257523 AMAT   AMAT   AMAT EPI CENTURA  Epitaxial Cluster Tools in Epitaxial Reactors EPI 39 - AMAT EPI CENTURA : Software Ver: B6.50 CB1 Amps: 300A Vita Controller Flow Point Model: Nano Valve Gas Panel Type: Configurable Wafer Size: 200mm (with conversion kit 150mm is possible) M-Monitor: CRT 3 Chambers ATM EPI With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)  Standard pneumatic waferlift Center Finding System: OTF Buffer robot: HP+ Piezocon sensor: No VSB: Yes Wide Body LL Tool called "EPI39" 1   Villach, Kärnten 257176 AMAT   AMAT   EPI Centura ACP  Epitaxial Cluster Tools in Epitaxial Reactors EPI Centura ACP 300mm "Yu Shan": Brand new and unused EPI Centura ACP 300 mm 4 Chambers;  Chamber code RH3, Lamp type BNA8 R3 Mainframe Configuration E4 Single, 4 Facet SC ENP BLK2, Loadport AMAT Standard 300mm, EPI Water Module LT Design. Tool out of Project: "Yu Shan" The original rough IFX Equipment procurement value was 10,3 M€ Will be now sold for an attractive price.  Equipment is...  ...brand new  ...never used   ...original packaged and crated  ...located in Asia  ...complete and fully functional  ...professional stored in Warehouse 1   Regensburg, Bavaria 238643 PVA TePla   PVA TePla   TWIN  Wafer Fabrication Equipment - Other in Wafer Fabrication Equipment 1   Villach, Carinthia 256920 Varian   Varian   Viision 200+  High Current Implanters in Ion Implantation Equipment Implanter Varian Viision 200+: 200 mm Implanter in very good condition Price net 982k$  based on Incoterm FCA, as is without warranty   1 982,263.16 Villach, Carinthia 255371 Suss MicroTec   Suss MicroTec   ACS200 Gen3  Wafer Fabrication Equipment - Other in Wafer Fabrication Equipment InkJet Printer (Süss ACS200): Süss Micro Tec ACS200 Gen 3 1   Regensburg, Bavaria 256750 LAM Research Corp.   LAM Research Corp.   Alliance 9400 PTX  Cluster Plasma Tools - Poly/Nitride in Cluster Plasma Tools LAM Alliance 9400 PTX: Mainframe with 3 Plasmachambers C-Upgrade in 2024 Mainframe and 2 Plasmachambers fully usable 1 Plasmachamber Hardware incomplete 1   Regensburg, Bavaria 255827 LAM Research Corp.   LAM Research Corp.   2300 Kiyo  Cluster Plasma Tools - Oxide in Cluster Plasma Tools Lam Kiyo Chamber L2301-B: Semiconductor ETC Chamber with RF Cart Incl. Gasbox and Rocker Valve in production until January 2023 1   Villach, Carinthia 259300 LAM Research Corp.   LAM Research Corp.   Rainbow 4520 XL  Cluster Plasma Tools - Oxide in Cluster Plasma Tools LAM Rainbow 4520 XL: - without UI Computer, Chiller and Pump - Generatorrack with 2 Generatoren 2MHz und 27MHz (135kg) - no ISO Chamber 1   N* Regensburg, Bavaria 259305 LAM Research Corp.   LAM Research Corp.   TCP 9600  Cluster Plasma Tools - Metal in Cluster Plasma Tools LAM Research TCP 9600: - without UI Computer - Envision, ESC, Fixed Gap 1   N* Regensburg, Bavaria 256294 Nexx Apollo PVD  Nexx Apollo PVD  Horizontal Sputterers in Batch Sputtering Tools Nexx Apollo PVD: The Nexx Apollo PVD system is a fully automated Physical Vapor Deposition (PVD) tool using a multiple wafer multiple chamber design. The system deposits thin metal films used in interconnect metallization on wafers. It uses a staged vacuum system that allow short pump down time to achieve ultra high vacuum. The multi chamber design allows for precise control over all process parameters. 1   Kulim, Kedah 239644 Ramgraber   Ramgraber   SST  Solvent Wet Stations in Wet Processing Equipment Ramgraber SST: Used Configuration: Tank 1: EKC Tank 2: P1331 Tank 3 and 4: DMF Tank 5: IPA Known errors: Filter from tank 4 is leaking Heater 1 from tank 4 is broken Heater 3 from tank 4 is broken 1   F* Villach, Carinthia 256749 Semitool   Semitool   Cintillio SAT  Acid Wet Stations in Wet Processing Equipment Semitool Cintillio SAT (WET998-03): Toolcontroller with Windows XP Remote controller Ready for endpointdetection system Process: Copper / Titan-Wolfram / dHF (dilluted HF) div. spareparts possible (negotiable) 1   Regensburg, Bavaria 252586 LAM Research Corp.   LAM Research Corp.   SEZ SP 203  Wet Process Equipment - Other in Wet Processing Equipment Spin Etch Tool (8''tool): Spin Etch Tool (8''tool) 1   Kulim, Kedah 258113 Tel   Tel   ACT8-D  Lithography Equipment - Other in Lithography Equipment TEL ACT8-D -Track : ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3 1   N* Dresden, Sachsen 250488 Tel   Tel   MK7-S  Lithography Equipment - Other in Lithography Equipment TEL MK7-S Coater_Developer: missing parts: 2 resist pumps, 1Developer Line   Add. Info: TYP A1 M/C Typ FC-9801F#1 SD/HD Typ Commandpost System Vers. MK8G2.38 Alarm File ALM00166.OEN Sp. Al.File AL00TT.OEN GEM 1.72 Lines 1(3) Pumps 1xmini EBR programable T/H-Controller Semifab CD200 Backrinse yes Lines 1 x H-Nozzle Rinse yes Backrinse yes  Last Time in production 1/1/24   1   Dresden, Saxony 250489 Tel   Tel   MK7-S  Lithography Equipment - Other in Lithography Equipment TEL MK7-S Coater_Developer: missing parts: 2 resist pumps, 1Developer Line   Add. Info: TYP A M/C Typ FC-9801F#1 SD/HD Typ Commandpost System Vers. MK8G2.38 Alarm File ALM00166.OEN Sp. Al.File AL00TT.OEN GEM 1.72 Lines 1(3) Pumps 1xmini EBR programable T/H-Controller Semifab CD200 Backrinse yes Lines 1 x H-Nozzle Rinse yes Backrinse yes Last Time in production 1/1/24   1   Dresden, Saxony 250490 Tel   Tel   MK7-S  Lithography Equipment - Other in Lithography Equipment TEL MK7-S Coater_Developer: missing parts: 2 resist pumps, 1Developer Line   Add. Info: TYP A M/C Typ FC-9801F#1 SD/HD Typ Commandpost System Vers. MK8G2.38 Alarm File ALM00166.OEN Sp. Al.File AL00TT.OEN GEM 1.72 Lines 1(3) Pumps 1xmini EBR programable T/H-Controller Semifab CD200 Backrinse yes Lines 1 x H-Nozzle Rinse yes Backrinse yes 1   Dresden, Saxony 250491 Tel   Tel   MK7-S  Lithography Equipment - Other in Lithography Equipment TEL MK7-S Coater_Developer: missing parts: 2 resist pumps, 1Developer Line   Add. Info: TYP A M/C Typ FC-9801F#2 SD/HD Typ Commandpost System Vers. MK8G2.38 Alarm File ALM00166.OEN Sp. Al.File AL00TT.OEN GEM 1.72 Lines 1(3) Pumps 1xmini EBR programable T/H-Controller Shinwa CP-I Backrinse yes Lines 1 x H-Nozzle Rinse yes Backrinse yes   Last time in production: 01.01.24 1   Dresden, Saxony 250971 AP&S Customized Soln   AP&S Customized Soln     Wet Process Equipment - Other in Wet Processing Equipment WET Clean Strip (8''tool): WET Clean Strip (8''tool) 1   Kulim, Kedah 250972 AP&S Customized Soln   AP&S Customized Soln     Wet Process Equipment - Other in Wet Processing Equipment WET Clean Strip (8''tool): WET Clean Strip (8''tool), Currently the tool still working. 1   Kulim, Kedah 253558 Tel   Tel     Wet Process Equipment - Other in Wet Processing Equipment WET Clean with Ultrasonic Cleaner 8'': WET Clean with Ultrasonic Cleaner 8'' 1   Kulim, Kedah

*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Wafer Fabrication Equipment: AMAT, AP&S Customized Solutions, Applied Materials, Inc., ASM, Axcelis Technologies GmbH, Axcelis/Eaton, Canon, Eaton, LAM Research Corp., PVA TePla, Ramgraber, Semitool, Suss MicroTec, Tel, Varian