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Wafer Fabrication Equipment


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List all 98 product types under Wafer Fabrication EquipmentList all 98 product types under Wafer Fabrication Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
257348
AMAT  

AMAT  

DXZ/CXZ Chamber 

List all items of this typeCluster PECVD Tools

in Production Tools

3 DXZ/CXZ Chambers for Centura/P5000:

3 DXZ/CXZ Chambers for Centura/P5000
Mainframe is transport rack

 
1   Villach, Kärnten
256502
LAM Research Corp.  

LAM Research Corp.  

Allian 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   Villach, Carinthia
252024
Applied Materials  

Applied Materials  

200mm Centura II 

List all items of this typeCluster Plasma Tools - Other

in Cluster Plasma Tools

AMAT 200mm Centura II DXZx:

Centura MF II

Software: Vita Controller

Indexer: Narrow Body / Tilt out mit Dummy Wafer Storage

Robot: HP+

Chamber:

A -> DPS+

B -> DPS+

C -> IPS

D -> ASP+

E -> Single Cooldown

F -> Orienter

1   Regensburg, Bavaria
239336
AMAT  

AMAT  

Centura EPI 8 inch 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

AMAT Centura EPI 8 Zoll (#402):

The system was completely overhauled by us with external service AMAT on site at that time!; Blower controls upgraded every 3 chambers; Approximately 4 years ago the Complete Gas Cabinet was upgraded from Legaty to Universal Gas Cabinet on site with the FA. AMAT upgraded costs €0.5 million; The facility has proprietary Modorized Lift 3x;

 

 

1   Regensburg, Bavaria
256746
AMAT  

AMAT  

HDP Centura 

List all items of this typeCluster PECVD Tools

in Production Tools

AMAT Centura HDP:

Software: Win 10

OR 4000 WTM Controller

3x ENI Generator Racks

Chiller INR-498-011D

2x Remote Monitor

High Density Plasma Process

Process Chambers: A,B,C

Orienter chamber F

1   Regensburg, Bavaria
256339
Varian  

Varian  

 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Amat E500:

-Back end medium current Implanter

 

- 100002956

  
1   Kulim, Kedah
255502
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Advance - OFENV06C:

ASM Furnace Vertical - Advance 400

2 Reactors atmospheric

 

1   Villach, Carinthia
255500
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical - OFENV01D:

OFENV01D
Furnace with 2 Tubes

1x Reactor Dot. Poly Low Pressure

1x Reactor Atmosphere WET-OXID

1   Villach, Carinthia
255501
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical - OFENV05C:

ASM Furnace Vertical - Advance 400

2 Reactor atmospheric

Robot defect and need service 

1   Villach, Carinthia
255503
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical OFENV06D:

ASM Furnace Vertical - Advance 400

2x Reactor Dot. Poly Low Pressure

1   Villach, Carinthia
255504
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical OFENV07C:

ASM Furnace Vertical 

2 Reactor atmospheric

Reactor 1 is missing heater cassette, Motor driver, Board and loader arm

 

1   Villach, Carinthia
252684
AXCELIS NV8200P 
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

-MCINV8201

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› OEM Serial ID?

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Manufacturing date of the Equipment ?

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100000605

1   Kulim, Kedah
252685
AXCELIS NV8200P 
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

MCINV8202

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› A pictures say more as 1.000 words. Any pictures available? Please provide as much as possible.

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100001850

1   Kulim, Kedah
256469
Axcelis/Eaton  

Axcelis/Eaton  

NV8250HT 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Axcelis NV8250HT:
Equipment Konfiguration: 
Type:NV8250HT
Energy Config:0 - 250Kv Midcurrent
Serialnumber:908
Build Year:2002
Date of first usage:buyed new from vendor
Current Condition: Good
CE-Conformity:Yes
Location:greyroom
Voltage:208V
Cryo-Pumps:3x CTI/Edwards Onboard: OB-8
Cryo-Kompressor:CTI 9650 Low-Voltage
Turbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003C
Rough-Pumps:Edwards: without QDP40, not included
Endstation Rough-Pump:not included
Wafersize:8inch(200mm)
Clamp-Type:E-Chuck green with Non-µC Controller
Wafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)
Gasbox:Modular 5-String, 4x 2,0L Size
String1:Argon Carriergas; MFC Unit-1662 2sccm BF3
String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3
String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3
String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
Beam-Profiler Type:Belt-Drive
Gear-Type's:Scan: Planetary  Tilt: Planetary
Source-Type:ELS4 IHC-Source without Vaporizer
HV-Transformer:Silicon-Oil
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSolaris SUN AXI 3HE (Special case)
Second-WorkstationSolaris SUN Sparc5
Software-Version:5.1.4.1
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:177 Type
Notes:Upper-Rack Panel missing
 Clean-Room Table missing on frontside
 all 4 wheels on oil-isolation transformer are broken
 Minor modifications on tool
 No Manual-Set/ no Spares include
 tool was used 24/7 full in production between 15 and 230kv Energy
 If required, tool can be inspected on site, but no Power
1   Regensburg, Bavaria
250598
Axcelis Technologies  

Axcelis Technologies  

OPTIMA_HD 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

1   Dresden, Saxony
250700
Canon  

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Only for sale for an competetive price!

 

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1   Dresden, Saxony
250701
Canon  

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1   Dresden, Saxony
251212
Eaton  

Eaton  

GSD200E/80 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

Eaton GSD200E/80 Highcurrent:
Energy Config:0 - 80Kv Highcurrent
Serialnumber:80517
Build Year:2000
Date of first usage:begin of year 2001
Current Condition: Good
CE-Conformity:Yes
Cryo-Pumps:CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!!
Cryo-Kompressor:CTI 9650 Low-Voltage
Turbo-Pumps:Seiko STP A2203 fully refurbed included!!
Terminal-Rough-Pump:without (Edwards Config)
Endstation Rough-Pump:without (Edwards Config)
Wafersize:200mm
Disk-Type:Si-coated Disk fully refurbed included!!
Wafer-Cooling:no Disk-Chiller included !
Gasbox:5-String, 4x Toxic-Low-Pressure
String1:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
String3:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
String4:SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
String5:Argon Carriergas; MFC Brooks GF120 10sccm-N2
Disk-Drive:Direct-Drive
Dose-Type:Regular
Source-Type:ELS4 IHC-Source without Vaporizer
Hghvoltage-Transformer:Oil
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSUN Solaris AXI 3HE
Second-Workstationwithout
Software-Version:6.13.5.1 (no license included)
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:V6 Type
Conditiontool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024
AvailabilityImmediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. Depending on the availability of external service providers
Notes:slight corrosion spots on the frame, just a visual matter, see IMG_0810_n.jpg
 Clean-Room Table on frontside not included
 Original Lower Machine Front Panels not included (below the Table)
 Rough-Pumps not included
 Endstation Flowhood not included
 Disk-Chiller not included
 modified Plasma-Gun Power-Supply installed(TDK)
 Minor modifications on tool
 No Manual-Set/ no Spares
 If required, tool can be inspected on site
1   Regensburg, Bavaria
257523
AMAT  

AMAT  

AMAT EPI CENTURA 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

EPI 39 - AMAT EPI CENTURA :

Software Ver: B6.50

CB1 Amps: 300A

Vita Controller

Flow Point Model: Nano Valve

Gas Panel Type: Configurable

Wafer Size: 200mm (with conversion kit 150mm is possible)

M-Monitor: CRT

3 Chambers ATM EPI

With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

 Standard pneumatic waferlift

Center Finding System: OTF

Buffer robot: HP+

Piezocon sensor: No

VSB: Yes

Wide Body LL

Tool called "EPI39"

1   N* Villach, Kärnten
257176
AMAT  

AMAT  

EPI Centura ACP 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

EPI Centura ACP 300mm "Yu Shan":

Brand new and unused EPI Centura ACP 300 mm

4 Chambers;  Chamber code RH3, Lamp type BNA8 R3
Mainframe Configuration E4 Single, 4 Facet SC ENP BLK2, Loadport AMAT Standard 300mm, EPI Water Module LT Design.

Tool out of Project: "Yu Shan"

The original rough IFX Equipment procurement value was 10,3 M€

Will be now sold for an attractive price.

 Equipment is... 

...brand new 

...never used  

...original packaged and crated 

...located in Asia 

...complete and fully functional 

...professional stored in Warehouse

1   Regensburg, Bavaria
238643
PVA TePla  

PVA TePla  

TWIN 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

1   Villach, Carinthia
256920
Varian  

Varian  

Viision 200+ 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

Implanter Varian Viision 200+:

200 mm Implanter in very good condition

Price net 982k$  based on Incoterm FCA, as is without warranty

 

1 982,263.16 Villach, Carinthia
255371
Suss MicroTec  

Suss MicroTec  

ACS200 Gen3 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

InkJet Printer (Süss ACS200):

Süss Micro Tec ACS200 Gen 3

1   Regensburg, Bavaria
256750
LAM Research Corp.  

LAM Research Corp.  

Alliance 9400 PTX 

List all items of this typeCluster Plasma Tools - Poly/Nitride

in Cluster Plasma Tools

LAM Alliance 9400 PTX:

Mainframe with 3 Plasmachambers

C-Upgrade in 2024

Mainframe and 2 Plasmachambers fully usable

1 Plasmachamber Hardware incomplete

1   Regensburg, Bavaria
255827
LAM Research Corp.  

LAM Research Corp.  

2300 Kiyo 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

Lam Kiyo Chamber L2301-B:

Semiconductor ETC Chamber with RF Cart

Incl. Gasbox and Rocker Valve

in production until January 2023
1   Villach, Carinthia
256294
Nexx Apollo PVD 
Nexx Apollo PVD 

List all items of this typeHorizontal Sputterers

in Batch Sputtering Tools

Nexx Apollo PVD:

The Nexx Apollo PVD system is a fully automated Physical Vapor Deposition (PVD) tool using a multiple wafer multiple chamber design. The system deposits thin metal films used in interconnect metallization on wafers. It uses a staged vacuum system that allow short pump down time to achieve ultra high vacuum. The multi chamber design allows for precise control over all process parameters.

1   Kulim, Kedah
239644
Ramgraber  

Ramgraber  

SST 

List all items of this typeSolvent Wet Stations

in Wet Processing Equipment

Ramgraber SST:

Used Configuration:

Tank 1: EKC

Tank 2: P1331

Tank 3 and 4: DMF

Tank 5: IPA

Known errors:

Filter from tank 4 is leaking

Heater 1 from tank 4 is broken

Heater 3 from tank 4 is broken

1   F* Villach, Carinthia
256749
Semitool  

Semitool  

Cintillio SAT 

List all items of this typeAcid Wet Stations

in Wet Processing Equipment

Semitool Cintillio SAT (WET998-03):

Toolcontroller with Windows XP

Remote controller

Ready for endpointdetection system

Process: Copper / Titan-Wolfram / dHF (dilluted HF)

div. spareparts possible (negotiable)

1   Regensburg, Bavaria
252586
LAM Research Corp.  

LAM Research Corp.  

SEZ SP 203 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Spin Etch Tool (8''tool):

Spin Etch Tool (8''tool)

1   Kulim, Kedah
258113
Tel  

Tel  

ACT8-D 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL ACT8-D -Track :

ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3

1   N* Dresden, Sachsen
250488
Tel  

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A1
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 Last Time in production 1/1/24

 

1   Dresden, Saxony
250489
Tel  

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

Last Time in production 1/1/24

 

1   Dresden, Saxony
250490
Tel  

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

1   Dresden, Saxony
250491
Tel  

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#2
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Shinwa CP-I
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 

Last time in production: 01.01.24

1   Dresden, Saxony
250971
AP&S Customized Soln  

AP&S Customized Soln  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean Strip (8''tool):

WET Clean Strip (8''tool)

1   Kulim, Kedah
250972
AP&S Customized Soln  

AP&S Customized Soln  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean Strip (8''tool):

WET Clean Strip (8''tool), Currently the tool still working.

1   Kulim, Kedah
253558
Tel  

Tel  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean with Ultrasonic Cleaner 8'':

WET Clean with Ultrasonic Cleaner 8''

1   Kulim, Kedah


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Wafer Fabrication Equipment:
AMAT, AP&S Customized Solutions, Applied Materials, Inc., ASM, Axcelis Technologies GmbH, Axcelis/Eaton, Canon, Eaton, LAM Research Corp., PVA TePla, Ramgraber, Semitool, Suss MicroTec, Tel, Varian