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Wafer Inspection Tools


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List all 36 product types under Wafer Inspection ToolsList all 36 product types under Wafer Inspection Tools


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
179175
Applied Materials  

Applied Materials  

Compass 200mm 

List all items of this typePatterned Wafer Inspection

in Surface Inspection

1   F* Regensburg, Bavaria
AMAT Compass 200mm:

COMPASS PRO* – INCREASING SENSITIVITY AND THROUGHPUT

FOR 100NM CHALLENGES

Addressing the increasing need for higher sensitivity at

higher throughputs, the CompassPro introduces new features

targeted at grainy layers, complex devices such as combined

logic and memory, and more accurate die-to-die precision,

resolution and defect reporting. Additionally, CompassPro

optimizes performance on copper and low-k with predefined

recipes. CompassPro patterned wafer inspection

technology helps our customers to actively engineer high

yield in the shortest possible time. The “Pro-active”

approach provides an un-rivaled solution set for patterned

wafer inspection in the nanometer era.

163973
Applied Materials  

Applied Materials  

Compass Pro 300 

List all items of this typePatterned Wafer Inspection

in Surface Inspection

1   F* Regensburg, BY
AMAT COMPASS PRO 300mm:
Darkfield Defect Inspection,
2x 300mm Load Ports Asyst SMIF-300FL
163974
Applied Materials  

Applied Materials  

Compass Pro 300 

List all items of this typePatterned Wafer Inspection

in Surface Inspection

1   F* Regensburg, BY
AMAT COMPASS PRO 300mm:
Darkfield Defect Inspection,
2x 300mm Load Ports Asyst SMIF-300FL
163975
Applied Materials  

Applied Materials  

Compass Pro 300 

List all items of this typePatterned Wafer Inspection

in Surface Inspection

1   F* Regensburg, BY
AMAT COMPASS PRO 300mm:
Darkfield Defect Inspection
2x 300mm Load Ports Asyst SMIF-300FL
Tool already disassembled.
180474
Applied Materials  

Applied Materials  

NanoSEM 3D 

List all items of this typeCritical Dimension Scanning Electron Microscopes

in Microscopes

1   F* East Fishkill, NY
Applied Materials NanoSEM 3D, 300mm wafers, CD SEM:

MULTIPLE UNITS AVAILBLE.  PLEASE INQUIRE.


SEM - Critical Dimension (CD) Measurement

Currently configured for 300mm wafers

CE Marked

Install Type: Stand Alone

Cassette Interface:

• (3) 300mm FOUP

Roll-Around Ergo-Station w/Touch-Screen

Status Lamp

Options:

• Slope Reconstruction

• CH Analysis

• Profile Grade

• Discrete Inspection

• Defect Review

• ARAMS (ES8)

Power Requirements: V 120/208, 8A, Single Phase / 3-Phase, 5-Wire, Freq 50/60Hz

 

Software Options:

• Slope Reconstruction

• CH Analysis

• Profile Grade

• Discrete Inspection

• Defect Review

• ARAMS (ES8

180514
Applied Materials  

Applied Materials  

NanoSEM 3D 

List all items of this typeCritical Dimension Scanning Electron Microscopes

in Microscopes

1   F* East Fishkill, NY
Applied Materials NanoSEM 3D, 300mm wafers, CD SEM:

Applied Materials NanoSEM 3D, 300mm wafers, CD SEM

MULTIPLE UNITS AVAILABLE.  PLEASE INQUIRE.


SEM - Critical Dimension (CD) Measurement

Currently configured for 300mm wafers

CE Marked

Install Type: Stand Alone

Cassette Interface:

• (3) 300mm FOUP

Roll-Around Ergo-Station w/Touch-Screen

Status Lamp

Options:

• Slope Reconstruction

• CH Analysis

• Profile Grade

• Discrete Inspection

• Defect Review

• ARAMS (ES8)

Power Requirements: V 120/208, 8A, Single Phase / 3-Phase, 5-Wire, Freq 50/60Hz

 

Software Options:

• Slope Reconstruction

• CH Analysis

• Profile Grade

• Discrete Inspection

• Defect Review

• ARAMS (ES8

 

Tool ID: KA03

195983
Applied Materials  

Applied Materials  

Elite MS MC 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   Dresden, Saxony
Applied Materials, ELITE M5 MC, 300mm, e-Beam Inspection:
Applied Materials, ELITE M5 MC, 300mm, e-Beam Inspection

iii Multiple Units Available.  Please inquire !!!
176719
SELA  

SELA  

EM2 

List all items of this typeSample Preparation - Other

in Sample Preparation

1   F* Regensburg, BY
Automated TEM and SEM sample preparation system - SELA EM2:

A dedicated, automated, timesaving, and user-friendly system that enables a total solution for TEM/STEM and SEM sample preparation for both cross section and plan view in a wide range of applications. Featuring cryo-cooled, dry saw process, the EM2 system prepares specimens of either crystalline or amorphous materials. The output sample is mounted onto a compatible stub that allows rework.

Tool is completed.

Used within FE & BE failure analysis

195987
Bruker, D8FABLINE, 300mm, X-Ray Metrology 
Bruker, D8FABLINE, 300mm, X-Ray Metrology 

List all items of this typeOther Items

in Microscopes

1   Singapore,
Bruker, D8FABLINE, 300mm, X-Ray Metrology:
Bruker, D8FABLINE, 300mm, X-Ray Metrology


199447
Bruker, D8FABLINE, 300mm, X-Ray Metrology 
Bruker, D8FABLINE, 300mm, X-Ray Metrology 

List all items of this typeOther Items

in Microscopes

1   East Fishkill, New York
Bruker, D8FABLINE, 300mm, X-Ray Metrology:
Bruker, D8FABLINE, 300mm, X-Ray Metrology
178410
Buehler  

Buehler  

Ecomet-3000 

List all items of this typePolishing & Grinding Sample Prep Equipment

in Sample Preparation

1   F* Taichung, Taichung City
Buehler, Ecomet-3000 Polisher, 300mm:
Status: Bagged and Skidded
178407
Buehler  

Buehler  

Ecomet-3000 

List all items of this typePolishing & Grinding Sample Prep Equipment

in Sample Preparation

1   F* Taichung, Taichung City
Buehler, Polisher, Ecomet-3000 300mm:
Status: Bagged and Skidded
178409
Buehler  

Buehler  

Ecomet-3000 

List all items of this typePolishing & Grinding Sample Prep Equipment

in Sample Preparation

1   F* Taichung, Taichung City
Buehler, Polisher, 300mm:
Status: Bagged and Skidded
195353
FEI  

FEI  

DA300 

List all items of this typeMicroscopes - Other

in Optical Microscopes

1   Taichung, Taichung City
FEI, DA300, 300mm, FIB, Defect Analysis:
FEI, DA300, 300mm, FIB, Defect Analysis

S/N : D253


199704
FEI  

FEI  

EXPIDA 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   N* Dresden, Saxony
FEI, EXPIDA, Dual Beam FIB, 300mm :
FEI, EXPIDA, Dual Beam FIB, 300mm 

COLD.  Off Line


178293
Hitachi  

Hitachi  

4500 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   Singapore,
Hitachi, 4500 SEM, 200mm:
Manufactured in 1990
178296
Hitachi  

Hitachi  

Microanalysis System 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   F* Taichung, Taichung City
Hitachi, Metrology, Microanalysis System 300mm:
Status: Bagged and Skidded
178294
Hitachi  

Hitachi  

AS5000 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   F* Singapore,
Hitachi, Metrology, Wafer Particle & Defect Analysis , AS50002, 200mm:
Status: Cold Shutdown

Wafer Particle & Defect Analysis system AS5000

Defect data server




192497
Hitachi  

Hitachi  

S-5500 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   Malta, New York
Hitachi, S-5500- Schanning Electron Microscope, 300mm:
Hitachi, S-5500- Schanning Electron Microscope, 300mm


178287
Hitachi  

Hitachi  

S-7800 

List all items of this typeCritical Dimension Scanning Electron Microscopes

in Microscopes

1   F* Singapore,
Hitachi, S-7800 CD-SEM, 200mm:
Manufactured in 2008
199679
Hitachi  

Hitachi  

S-8840 

List all items of this typeCritical Dimension Scanning Electron Microscopes

in Microscopes

1   N* Singapore,
Hitachi, S-8840, CD SEM, 200mm:
Hitachi, S-8840, CD SEM, 200mm

On Line,
In the fab,
Working

S/N: 8363-03
195362
Hitachi  

Hitachi  

S-9380 

List all items of this typeCritical Dimension Scanning Electron Microscopes

in Microscopes

1   F* Singapore,
Hitachi, S-9380, CD SEM, 300mm:
Hitachi, S-9380, CD SEM, 300mm

Tool is Bagged & Skidded in Warehouse

S/N : 2146-01
197918
Hitachi  

Hitachi  

S-9380II 

List all items of this typeCritical Dimension Scanning Electron Microscopes

in Microscopes

1   F* Taichung, Taichung City
Hitachi, S-9380II, CD-SEM, 300mm:
Hitachi, S-9380II, CD-SEM, 300mm

!!! Multiple Units Available!!!  Please Inquire
178299
Hitachi  

Hitachi  

Z-5700 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   F* Taichung, Taichung City
Hitachi, Z-5700 Spectroscopy, 300mm:
Status: Bagged and Skidded
199446
HMI, EP3, 300mm, E-Beam Inspection System 
HMI, EP3, 300mm, E-Beam Inspection System 

List all items of this typeOther Items

in Microscopes

1   East Fishkill, New York
HMI, EP3, 300mm, E-Beam Inspection System:
HMI, EP3, 300mm, E-Beam Inspection System
199709
HSEB  

HSEB  

Axiospect300 

List all items of this typeWafer Inspection Microscopes

in Optical Microscopes

1   N* Dresden, Saxony
HSEB, Axiospect 300, Optical Microscope, 300mm:
HSEB, Axiospect 300, Optical Microscope, 300mm
199710
HSEB  

HSEB  

Axiospect300 

List all items of this typeWafer Inspection Microscopes

in Optical Microscopes

1   N* Dresden, Saxony
HSEB, Axiospect 300, Optical Microscope, 300mm:

HSEB, Axiospect 300, Optical Microscope, 300mm
Cold Offline

!!! Multiple Units Available !!! Please inquire.

178300
JEOL  

JEOL  

7555 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   Taichung, Taichung City
JEOL, Defect Review, 200mm:
Status: Bagged & Skidded in warehouse

Parts tool.  Listed as major parts missing.

178302
JEOL  

JEOL  

JEM-2500SE 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   Taichung, Taichung City
JEOL, JEM-2500SE Microscopes, 300mm:
Status: Bagged and Skidded
178303
JEOL  

JEOL  

JEM-2500SE 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   Taichung, Taichung City
JEOL, JEM-2500SE Microscopes, 300mm:
Status: Bagged and Skidded
187765
JEOL  

JEOL  

JWS 7555S 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   F* Singapore,
JEOL, JWS 7555S, Defect Review, 200mm:
JEOL, JWS 7555S, Defect Review, 200mm
189689
JEOL  

JEOL  

JWS-7515 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   F* Singapore,
JEOL, JWS-7515, 200mm, SEM:
JEOL, JWS-7515, 200mm, SEM

S/N: WS179028-108
137458
KLA-Tencor  

KLA-Tencor  

KLA AIT2 for 12" / 300 mm 

List all items of this typePatterned Wafer Inspection

in Surface Inspection

1   Regensburg, Bavaria
KLA AIT2/XP:
KLA AIT2
Equipment Code: MES313-02
Darkfield-Defectinspection AIT Fusion, 2Loadport, upgrad. 2004 to AIT XP


KLA AIT2
Serial Number: 9332
178326
KLA-Tencor  

KLA-Tencor  

CRS1010 

List all items of this typeWafer Inspection Microscopes

in Optical Microscopes

1   F* Singapore,
KLA-Tencor, CRS1010 Defect Review, 200mm:
Manufactured in 1997; Status: Bagged and Skidded
178304
KLA-Tencor  

KLA-Tencor  

ES31 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   F* Singapore,
178305
KLA-Tencor  

KLA-Tencor  

ES32 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   Taichung, Taichung City
KLA-Tencor, ES32, E-beam Inspection, 300mm:
Manufactured in 2007; Status: Bagged and Skidded


!!! MULTIPLE UNITS AVAILABLE!!! Please inquire
188890
KLA-Tencor  

KLA-Tencor  

eS810 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   East Fishkill, New York
KLA-TENCOR, eS810, e-beam inspection, 300mm:
KLA-TENCOR, eS810, e-beam inspection, 300mm
188891
KLA-Tencor  

KLA-Tencor  

eS810 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   F* East Fishkill, NY
KLA-TENCOR, eS810, e-beam inspection, 300mm:
KLA-TENCOR, eS810, e-beam inspection, 300mm

S/N: 5158014


Voltage Contrast and Large Physical Defect Inspection, Electron Beam Inspection (EBI).  Most updated KLA Tencor EBI tool available including Super Wide Optics.  Two 300mm FOUP load ports.  Vendor maintained throughout.  

192694
MASS-PCB  

MASS-PCB  

SV200WV 

List all items of this typePolishing & Grinding Sample Prep Equipment

in Sample Preparation

1   F* Malta, New York
MASS-PCB, SV200WV, Abrasive Planarizations System:
MASS-PCB, SV200WV, Abrasive Planarizations System

The grinding machine SV 200 WV serves to remove the excess plugging paste from
printed circuit boards and inner layers following the Via Hole Plugging process. That
allows getting a flat uniform surface of the copper surface.
The grinding disk is driven by a servo motor, the x-y movement is manual by
hand.

The basic frame is made up of a stable welded stainless steel rack. The outer jacket
is made up of canted stainless sheet metal sheets. All the sheets allow be opening
with ease by entering catch locks and removing for allowing access.
The grinding head is covered with a hood with aluminium glass profiles. The plant is
built up and designed such that all components are clearly arranged.

Cooling water is transported via pump to the grinding head. On the bottom of the
machine you can find the belt filter equipment, where the cooling water is filtered.

The inner- or outer-layer of the printed circuit board is fixed on the aluminium working
plate by vacuum.
The working area is protected by safety glass. The specific linear guides and the
adjustable grinding pressure result in an excellent grinding performance and prevent
the copper foil from possibly being ground through. The grinding head can be
lowered to the printed circuit board with an exactness of 0,22 μm (0,0056 mil).
One turn (100 digits) eaquals 22μm (0,56 mil).

Technical data:
Plant length: 1400 mm
Plant width: 1100 mm
Plant height: 1700 mm
Working height: 980 mm
Weight 1000 Kg
Adjustment precision 0,22 μm
Vacuum working surface: 610 x 915 mm (24 x 36”)
Servo controlled turning of the grinding disks: 1000, 2000, 3000 rpm
Printed circuit board spectrum:
Gauge from / to: 0,3 – 15 mm
Maximum printed circuit board size: 610 x 915 mm (24 x 36”)
Electric connection:
Connected load: 5 kW
Working voltage: 3 x 400/480V, 3P, N, PE, 50/60 Hz

Compressed air connection: 6 bar
Filter unit: 60 l Water

179748
MULTIPROBE MP1, Atomic Force Prober (AFP), 300mm 
MULTIPROBE MP1, Atomic Force Prober (AFP), 300mm 

List all items of this typeOther Items

in Microscopes

1   F* Dresden, SN
MULTIPROBE MP1, Atomic Force Prober (AFP), 300mm:
MULTIPROBE MP1, Atomic Force Prober (AFP), 300mm
tool for micro probing of transistors at contact level
3 Probe heads,
MP1-system with semiauto stage/optics
Comes with : 
electronic rack with controllers for heads + PCs, probing enclosure unit with optical microscope+3 probe heads
Upgrades Include:
semiautomatic stage, optics & probe head control, 4th probe head




178325
Semicaps  

Semicaps  

SOM 3000 

List all items of this typeMicroscopes - Other

in Optical Microscopes

1   F* Taichung, Taichung City
Semicaps, SOM 3000 Scanning Optical Microscope, 300mm:
Status: Bagged and Skidded
182307
Suss Microtec  

Suss Microtec  

 

List all items of this typeOther Items

in Microscopes

1   F* Fishkill, New York
Suss Microtec BA300-MIT, 300mm Automated Inspection Tool:
Suss Microtec 300mm Automated Inspection Tool, BA300-MIT

Automated inspection tool inspects glass plates 13" x 14" molds do determine filling

Tool ID: MIT01
191172
VEECO (Bruker Nano), X-1D, AFM, 300mm 
VEECO (Bruker Nano), X-1D, AFM, 300mm 

List all items of this typeOther Items

in Microscopes

1   F* Dresden, Saxony
VEECO (Bruker Nano), X-1D, AFM, 300mm:
VEECO (Bruker Nano), X-1D, AFM, 300mm

Warm idle, installed.

S/N: 122
191173
VEECO (Bruker Nano), X-3D, AFM, 300mm 
VEECO (Bruker Nano), X-3D, AFM, 300mm 

List all items of this typeOther Items

in Microscopes

1   Dresden, Saxony
VEECO (Bruker Nano), X-3D, AFM, 300mm:
VEECO (Bruker Nano), X-3D, AFM, 300mm

Warm Idle

S/N: 146
191174
VEECO (Bruker Nano), X-3D, AFM, 300mm 
VEECO (Bruker Nano), X-3D, AFM, 300mm 

List all items of this typeOther Items

in Microscopes

1   F* Dresden, Saxony
VEECO (Bruker Nano), X-3D, AFM, 300mm:
VEECO (Bruker Nano), X-3D, AFM, 300mm

Unhooked Park Position 

S/N: 123
186714
Zeiss  

Zeiss  

Axiotron II 

List all items of this typeMicroscopes - Other

in Optical Microscopes

1   Singapore,
Zeiss, Axiotron II, 200mm Inspection Microscope:
Zeiss, Axiotron II, 200mm Inspection Microscope
185245
Zeiss  

Zeiss  

Axiotron II 

List all items of this typeWafer Inspection Microscopes

in Optical Microscopes

1   Singapore,
Zeiss, Axiotron II, 200mm Inspection Microscope:
Zeiss, Axiotron II, 200mm Inspection Microscope
185288
Zeiss  

Zeiss  

Axiotron II 

List all items of this typeWafer Inspection Microscopes

in Optical Microscopes

1   Singapore,
Zeiss, Axiotron II, 200mm Inspection Microscope:
Zeiss, Axiotron II, 200mm Inspection Microscope
191631
Zeiss  

Zeiss  

Axiotron II 

List all items of this typeWafer Inspection Microscopes

in Optical Microscopes

1   F* Burlington, Vermont
Zeiss, Axiotron II, 200mm Inspection Microscope:
Zeiss, Axiotron II, 200mm Inspection Microscope

Not working.
Manual XY Stage

S/N: 741567
195518
Zeiss  

Zeiss  

Axiotron II 

List all items of this typeWafer Inspection Microscopes

in Optical Microscopes

1   Singapore,
Zeiss, Axiotron II, 200mm Inspection Microscope:
Zeiss, Axiotron II, 200mm Inspection Microscope

Bagged & Skidded in warehouse.

S/N : 741361
199706
Zeiss  

Zeiss  

Ultra 55, LEO Gemini 

List all items of this typeScanning Electron Microscopes

in Inspection Equipment

1   N* Dresden, Saxony
Zeiss, Ultra 55, LEO Gemini, 300mm, SEM:
Zeiss, Ultra 55, LEO Gemini, 300mm, SEM



*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Wafer Inspection Tools:
Applied Materials, Inc., Buehler, FEI, Hitachi, HSEB, JEOL, KLA-Tencor, MASS-PCB, SELA, Semicaps, Suss MicroTec, Zeiss