Bio-Rad QS-500 FT-IR Spectrometer

• Transmissive & Reflective Film Measurement 
  • Si Epi Thickness, C & O in Si, BPSG Analysis
  • KBr Optical Components
  • Bio-Rad SPC 3200 Data Station
  • Upgradable to Computer Running Windows XP 
  • Bio-Rad 013-4100 Spectrometer Controller
  • Bio-Rad Stage Controller
  • Bio-Rad Robot Interface
  • Genmark Robot & Controller

BIORAD QS-1200 Automated FT-IR Spectrometer

• Non-Destructive Measurement of Epitaxial Silicon Films
• PIKE TECHNOLOGIES MAP300 Automatic Scanning Stage
  • Manual Loading for up to 300mm Wafers
  • 320 Test Points, 5mm Minimum Edge Exclusion & 3D Wafer Mapping
  • FTS-175 Optical Bench
    • Dynamically Tuned Beam Splitter
    • NKBr Beam Splitter
    • Dual Frequency IR Source
    • Upgraded HeNe Laser
    • System Control PC with Windows XP, 320G HD & 1G RAM
      • Win-IR Pro (Rev. 2.51) Application Software
      • QS-500 Epi (Rev. 1.31) Application Software
      • Microsoft Access Database Application
      • System Software, Applications Software & Site Preparation Manuals Included
      • Refurbished & Fully Functional

Bio-Rad Q8 Overlay Metrology Tool