Atomic Force Microscope AFMScanning Probe Microscope SPM

Stage size: 300mm

Accessories:

• Stage Controller: NanoScope Model 5000C-1
• Scanning Probe Microscope Controller: NanoScope IIIA
• Vibration Isolation Table and Acoustic Enclosure

Configuration: Mainframe

Rack of Powersupply is defective – Powersupply is ok

Function is ok – not in production but regular check

Tool on cleanroom floor

1 Palette of spares included:

2x Motion Controller (Newport Modell MM3000)

1x DSP Lock-IN Amplifier

1x Roboter Controller (Pri ESC-212)

1x Hot Chuck Temperatur Box (SDI)

1x Controller Fe Activation Box (SDI)

1x Roboter (Pri ATM-105-1-S)

1x Voltmeter (PDM-40a)

1x Voltmeter (PDM-60V)

1x Function Generator (Wafetek model 29)

1x Aligner (Brooks PRE-200)

2x Power Supply (Bertan 2341-1)

1x Box mit Anleitungen, div. Kleinteilen, Kabel

Nanometrics ECVPro Carrier Concentration Profiler

• For Si, SiC, II-VI, III-V & III-Nitrides 
• Hamamatsu LC8 UV Light Source
• ECVision In-Situ Camera System
• Dual Frequency Measurement
• Carrier Frequency: 0.3kHz to 50kHz
• Depth Range: 0.05μm to 50μm
• Depth Resolution: 1nm 
• Dell PC, Windows 8 OS, ECV Pro SW Version 2.4.6.0

       Installation & Training Available

currently in use

available mid of 2026

KLA-Tencor DSW16E 300mm Calibration Wafer

• Part Number 0210691-000 (Advanced Technology Development)
• For Use on e-Beam Patterned Wafer Defect Inspection Tools  

Bio-Rad Q7 Overlay Metrology Tool

Bio-Rad Q8 Overlay Metrology Tool