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Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, California
Item ID: 195237

Offered1 Offered at Best Price

SUSS Microtech, MA-200E, Exposure Tool, 200mm

SUSS Microtech, MA-200E, Exposure Tool, 200mm

Q & A :

Q: What size is the lamphouse?  A: type ZE1000G/175944 1500W 

Q:  What is the lamp intensity (mW) for this machine? A: We typically used 30 mW/sq cm at the wafer.  The machine could provide more intensity with a new lamp.

Q: What filter is available? A: We used G, H and I line together. Other filters are possible and available from Suss. 

Q: What is the model of power supply does it have? A: CIC1200/157308L

Q: Is the software using Window base? A: Yes

Q: What model microscope is on the tool? A:  DVM 8 Dual video Microscope

Q: What is the current status and condition? Any known problems? A: Working condition, no issues

Q: Does it have BSA – backside alignment? A: No BSA

Q: Is it able to run 6in and 8in? Does it have mask plate for both 6in and 8in?  A: Tool is set up for 10" masks and 8" wafers.  At Suss it was tested with 9" masks, possible with another mask holder.  The tool can be setup for 6" wafers but we have no experience with this.  Never ran 6" wafers.

Q: What is the microscope magnification? A: Please confirm at inspection.

Q: Is there chiller given together with the machine? A: No

Tool ID: 15J1486 AA

SUSS Microtech, MA-200E, Exposure Tool, 200mm
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Location: East Fishkill, New York
Unit Price Unstated
Number of Units 1
Manufacturer Suss MicroTec
Model MA-200E
Year of Manufacture 2004

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Santa Clara , California
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Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, California