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Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, California
Item ID: 195489

Offered1 Offered at Best Price

KLA-Tencor, HRP-350, 300mm

KLA-Tencor, HRP-350, 300mm

S/N : 7020358

DOM : 8/2011

System still in the Clean Room.


P-350 Profiler

Long range linearly-encoded sample stage for scans up to 300mm Integrated vibration isolation system


* MaxDamp isolators: Enhanced vertical/lateral vibration isolation and f aster settling time

* Precision Leveling System (PLS): Digital controller with non-contact X , Y, and Z sensors

for accurate positioning of the isolation system

* Acoustic insulation to absorb external acoustic energies Vibration dampeninP-350 measurement head: * Low noise probe sensor assembly material to absorb external and internal vibrational energies

* Stiffer head structure to minimize lateral and vertical deflection

* Standard range, 131um UltraLite sensor

Voltage configuration: 200-250V 2um radius, 60 deg. cone angle stylus

* PC with 2.8 GHz P4 processor

* P-250/350 SR (131um) Measurement Head

* -250/P-350 with SR, 131um Sensor, Standard Range, 131um Ultra Lite sensor

* Total Dynamic Range: 0-131um

* Max Step Height: 100um

Dual FIMS, Phoenix TDK LP

300mm FIMS wafer handler

TDK loadports (QTY : 2)

* Compatible with 25 wafer FIMS FOUPs

* Integrated mini-environment with HEPA filtration * Loadport door mounted mapper

* Low contact pre-aligner

* 2-inch particle monitoring hole

* Remote UI (Secondary UI

* Second user interface located on the loadport side of the 350 profiler

* Bulkhead or bay/chase configuration

Ion Shower, Phoenix Dual FIMS

De-ionizers in the handler chamber

Mini Environment

Low Contact Chuck

Low backside contact chuck * Reduces backside particles and metallic contamination

300mm Stress w/ Stress Chuck

Profiler scans to measure changes in wafer shape due to film stress * Includes 3-point wafer chuck, compatible with automatic wafer loading

Signal Tower (RYGBW), 2 Audio

GEM/SECS and RS232

HSMS -High Speed Messaging System

E87 Carrier Management Services (Based on E39)

E40 Process Job Management, E94 Control Job Management and E90 Substrate Tracking

Two AdvanTag Radio Frequency (RF) Carrier ID Readers

300mm Tester Seismic Clamps

UltraSharp: 20nm, 20 deg

DuraSharp II: 40nm/40° Cert.

E84 Error Recovery

MMI Loadport


AMC Filter Adaptor DFIMS Handler

AMC Filter Adaptor Inspection Module

Tool ID: MES2500

KLA-Tencor, HRP-350, 300mm
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Location: Malta, New York
Unit Price Unstated
Number of Units 1
Manufacturer KLA-Tencor
Model HRP
Year of Manufacture 2011

OFFERED BY: (click name below to visit its website directly)

Santa Clara , California
Shipping & Handling:

All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
GLOBALFOUNDRIES is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.

All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.


Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, California