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FULL DESCRIPTION of Item 245275

in Epitaxial Cluster Tools
Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria
 
Item ID: 245275

Offered 1 Offered at Best Price


AMAT EPI CENTURA HTF (EPI5)

Software Ver: B6.30

CB1 Amps: 300A

SBC Type: V452

Flow Point Model: Nano Valve

Gas Panel Type: Configurable

Wafer Size: 200mm (with conversion kit 150mm is possible)

M-Monitor: CRT

3 Chambers ATM EPI

With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

HDD was upgraded to RAID System

Tool called "EPI5"

AMAT EPI CENTURA HTF (EPI5)
  Click to see additional image(s)... other images

Location: Villach, Carinthia
Unit Price Unstated
Number of Units 1
Manufacturer Applied Materials
Model EPI5
Wafer Size Range 
  Minimum 150 mm
  Maximum 200 mm
  Set Size 200 mm
Number of Chambers 3
Process Capabilities ATM EPI PROCESS
Chamber 1 Description 

HTF ATM EPI

Chamber 2 Description 

HTF ATM EPI

Chamber 3 Description 

HTF ATM EPI

Controller Type Microprocessor Controller Type
Software Revision Level B6.30
Temperature Control Dual Pyrometer
Extended Description  Details at FEP_Core_Inspection_Checklist_REV_D_IFX_Villach_Epi5_6137_no_pics.xlsx
Power Requirements 480 V     300.0 A     50 Hz     3¬†Phase
Year of Manufacture 1996
Condition Good

OFFERED BY:
(click name below to visit its website directly)
Infineon Technologies AG - Equipment Trade
IFAT FE PV PCS MNT LS
Regensburg , Bavaria
+49 941 202 2755
 
Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment
 


Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria