Bruker, D8FABLINE, 300mm, X-Ray Metrology
The tool is an automated High resolution X-ray diffractometer, clean room
(class 1 US-FED-STD 209 or Class 2 ISO 14644-1) compatible, with full 300
mm wafer mapping capabilities.
The D8 FABLINE consists of two stainless steal cabinets attached to each
The first one is an X-ray analytical module composed of: radiation safe
enclosure, vertical D8 goniometer, UMC 300mm wafer stage and dedicated
optical set-ups, and all required supplies. The second is a handling module
Equipment Front End Module (EFEM) Bridge tool Startan from Asyst.The wafers
are carried either in FOUP (Front Opening Unified Pod) for 300mm or in FOUP
insert for 200mm..
Tool ID: KZD1