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FULL DESCRIPTION of Item 225309

in Oxide Etchers
Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria
 
Item ID: 225309

Offered 1 Offered at Best Price


Lam Rainbow 4520i

LAM3D

Oxid Etch Tool with Isotropic Etch chamber.

Lam Rainbow 4520i
  Click to see additional image(s)... other images

Location: Villach, Carinthia
Unit Price Unstated
Number of Units 1
Manufacturer LAM Research Corp.
Model 4520i
Wafer Size Range 
  Minimum 150 mm
  Maximum 200 mm
  Set Size 200 mm
Process Oxid Etch
Isotropic Etch Processing YES
Software Revision Level E-1.5.2
End Point Detection Monochromatic Endpoint
Cassette to Cassette YES
High Vacuum Pump No
Roughing Pump No
Chillers 
  Number of Chillers 1
  Chiller #1Manufacturer/Model LAM TCU 2080
Accessories 

Mainframe, Chiller TCU, RF Cart

Other Information 

Upgrade to VAT Throttle Valve

Year of Manufacture 1999
Condition Very Good

OFFERED BY:
(click name below to visit its website directly)
Infineon Technologies AG - Equipment Trade
Regensburg , Bavaria
+49 941 202 2755
 
Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment
 


Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria