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FULL DESCRIPTION of Item 226452

in Other Wet Process Equipment
Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria
 
Item ID: 226452

Offered 1 Offered at Best Price


LAM SEZ RST304

SP304 - SN0947

300mm / 12" Equipment

Chuck STD

Brooks ATM407 w Flip-Module

Medium1
used for HF HouseSupply,
able to mix DHF
Mix-Tank,
Buffer-Tank (10ml BP) for HF,
PW for DI
Single-Hex

Medium2
used for DSP from CBM
able to mix DHF
NO Mixtank !
Buffer.Tank (10ml) HF (not used)
PW for DI
Double-Hex

Medium3
used for SED HouseSupply
NO Mixtank
Buffer-Tank(10ml) HF
Double-Hex

CBM
3 BufferTanks (H2SO4/H2O2/HF)
1 PW (DI)

Ozon-DIW
Modul is not functional, components removed/defective
- O3-generator removed
- O3-contactor defective
- ctrl-cabinet some parts(solenoid block)

Tool is located in Dresden, Germany.

Planned de-installation date is 1st September 2022. 

LAM SEZ RST304
  Click to see additional image(s)... other images

Location: Dresden, Saxony
Unit Price Unstated
Number of Units 1
Manufacturer LAM Research Corp.
Model RST304
Accessories 

used for decontamination wafersurface/backside
Medium1 HF (Pt), Medium2 DSP (Cu), Medium3 SpinEtchD (Au)
CBM(DSP), DIO3-Modul(defective), Brooks-Flip-Modul (clean/dirty)

Other Information 
Damages /Deficits signs of usage, some corrosion on metal surfaces
Missing Parts DIOzone modul defective / not functional
Any consumables/parts EOL (which one) electronics(CPU, Amplifiers)
Year of Manufacture 2005
Condition Good
Weight 7,716  lb  (3,500 kg)

OFFERED BY:
(click name below to visit its website directly)
Infineon Technologies AG - Equipment Trade
Regensburg , Bavaria
+49 941 202 2755
 
Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment
 


Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria