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LAM SEZ RST304
SP304 - SN0947 300mm / 12" Equipment Chuck STD Brooks ATM407 w Flip-Module Medium1 used for HF HouseSupply, able to mix DHF Mix-Tank, Buffer-Tank (10ml BP) for HF, PW for DI Single-Hex Medium2 used for DSP from CBM able to mix DHF NO Mixtank ! Buffer.Tank (10ml) HF (not used) PW for DI Double-Hex Medium3 used for SED HouseSupply NO Mixtank Buffer-Tank(10ml) HF Double-Hex CBM 3 BufferTanks (H2SO4/H2O2/HF) 1 PW (DI) Ozon-DIW Modul is not functional, components removed/defective - O3-generator removed - O3-contactor defective - ctrl-cabinet some parts(solenoid block) Tool is located in Dresden, Germany. Planned de-installation date is 1st September 2022.
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